A suggested structure, as a Hall Effect sensor, is studied by simulation, using COMSOL Multiphysics
Dimensions: The structure is a block of 40 * 40 * 5 um with an indent that can be shown in the image. the indent depth alpha can effect the sensitivity, and there might be an optimum value for this indent depth alpha.
A Constant potential difference of 5 V is applied to the X-axis boundaries and the alpha is changed only in Y-axis.
A constant uniform magnetic flux density of 0.5 T is applied on the pure vacuum space, along the Z-axis and changing the value of alpha from 1 to 19 um, The optimum alpha is determined to achieve more voltage difference along Y-axis.
The hall effect is clearly observable from the simulation results, on an N-type doped Silicon with impurity of 2E16
based on the results from alpha parameter sweep, the optimum value of 6 um is achieved (with Voltage difference of 1.460200 V ).
The table of results:
| alpha [um] | Terminal 1(V) | Terminal 2(V) | diffrence(V) |
|---|---|---|---|
| 1 | 3.1500000 | 1.84910000 | 1.300900 |
| 2 | 3.1900000 | 1.81500000 | 1.375000 |
| 3 | 3.2100000 | 1.79340000 | 1.416600 |
| 4 | 3.2200000 | 1.77970000 | 1.440300 |
| 5 | 3.2309000 | 1.76830000 | 1.462600 |
| 6 | 3.2366000 | 1.76460000 | 1.472000 |
| 7 | 3.2300000 | 1.76980000 | 1.460200 |
| 8 | 3.2219000 | 1.77790000 | 1.444000 |
| 9 | 3.2079000 | 1.79210000 | 1.415800 |
| 10 | 3.1900000 | 1.81450000 | 1.375500 |
| 11 | 3.1600000 | 1.84360000 | 1.316400 |
| 12 | 3.1200000 | 1.87980000 | 1.240200 |
| 13 | 3.0800000 | 1.92260000 | 1.157400 |
| 14 | 3.0259000 | 1.97370000 | 1.052200 |
| 15 | 2.9674000 | 2.03260000 | 0.934800 |
| 16 | 2.9006000 | 2.09920000 | 0.801400 |
| 17 | 2.8200000 | 2.17610000 | 0.643900 |
| 18 | 2.7400000 | 2.25790000 | 0.482100 |
| 19 | 2.6300000 | 2.36290000 | 0.267100 |
The mph file for this project is available in This link which is the COMSOL workspace file and hitting COMPUTE button will result in parameter sweep and plotting the results.
Please feel free to contact me about this project on my email.