SEMI PROTOCOL STACK RUST LIBRARIES

Copyright © 2024 Nathaniel Hardesty, Licensed under the MIT License

This software is created by a third-party and not endorsed or supported by SEMI.

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PROTOCOL MODEL

Although SEMI does not publish or correlate their protocol standards into a particular model, an explanation of the role of each part of the protcol stack is desirable. These considerations are taken into account:

• SEMI often produces graphics which place certain protocols in certain implied but unnamed layers in a protocol stack.
• The IETF model fails to provide explanatory power, as all but one SEMI protocol would fit entirely into its Application Layer.
• The OSI model, while appearing to be a decent fit for the SEMI standards which were developed in the 80s and early 90s, no longer provides an accurate model of SEMI's protocols.

Thusly, a bespoke model is used for SEMI's protocol stack. This model is subject to change, as it is only provided for explanatory purposes.

1. Transaction Layer
   • Provides the reliable transmission of messages formed using bytes.
   • Provides the correlation of messages in two-way conversation into transactions, i.e. request/response pairs.
2. Encoding Layer
   • Provides a data syntax, the serialization of the syntax into bytes, and the deseralization of bytes into the syntax.
   • Provides a set of messages formed using the syntax with defined semantic meaning, and the way in which these messages can be used in transactions.
3. Integration Layer
   • Provides the correlation of transactions into conversations.
   • Provides the pragmatics by which the context of conversations is stored, accessed, and changed.
4. Operation Layer
   • Provides contexts to be manipulated for specific operational purposes, including the management and tracking of particular objects.

TRANSACTION LAYER

HIGH-SPEED SECS MESSAGE SERVICES (HSMS)

Based on SEMI E37, HSMS is a protocol designed to facilitate the reliable transmission of messages between semiconductor equipment over TCP/IP.

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PLANNED TRANSACTION LAYER PROTOCOLS

• SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) - SEMI E4

ENCODING LAYER

SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)

Based on SEMI E5, SECS-II is a protocol designed to facilitate a common syntactic and semantic message structure used in communications between semiconductor equipment.

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PLANNED ENCODING LAYER PROTOCOLS

• XML SECS-II Message Notation (SMN) - SEMI E173

INTEGRATION LAYER

PLANNED INTEGRATION LAYER PROTOCOLS

• Generic Equipment Model (GEM) - SEMI E30
• Object Services (OSS) - SEMI E39

OPERATION LAYER

PLANNED OPERATION LAYER PROTOCOLS

• Processing Management (PJM) - SEMI E40
• Carrier Management (CMS) - SEMI E87
• Substrate Tracking (STS) - SEMI E90
• Control Job Management (CJM) - SEMI E94
• Equipment Performance Tracking (EPT) - SEMI E116
• Time Synchronization - SEMI E148
• Module Process Tracking (MPT) - SEMI E157